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Matteo Rinaldi received his first-level (B.S.) and second-level (M.Sc.) Laurea degrees in Electronic Engineering (summa cum laude) from the University of Rome Tor Vergata, Rome, Italy, in 2004 and 2007, respectively, and his Ph.D. degree in Electrical and Systems Engineering from the University of Pennsylvania, Philadelphia, in 2010. His research interests primarily include Micro/Nano Electro Mechanical Systems (MEMS/NEMS) devices with particular emphasis on Aluminum Nitride (AlN) piezoelectric NEMS sensors for physical, chemical and biological detection, AlN Radio Frequency MEMS/NEMS devices, micro/nano fabrication techniques and integration of MEMS/NEMS devices with electronics. He has authored more than 20 publications in the aforementioned research areas and also holds 3 device patent applications in the field of micro/nano mechanical resonant devices.

Matteo Rinaldi was the recipient of the Best Student Paper Award at the 2009 and 2011 IEEE International Frequency Control Symposiums. In March 2011 he was awarded with the S. J. Stein Prize for his superior achievements in the field of new or unique materials or applications for materials in electronics.

Matteo Rinaldi joined the Electrical and Computer Engineering department at Northeastern University as an Assistant Professor in the Spring 2012 semester.

Research & Scholarship Interests

Design and fabrication of a new class of micro/nano electromechanical systems (MEMS/NEMS) devices suitable for the implementation of high performance and miniaturized sensing platforms that can be used in a wide range of application areas such as homeland security, health care, environmental monitoring, aerospace and telecommunications
Affiliated With

Department Research Areas

College Research Initiatives

Honors & Awards

  • Defense Advanced Research Projects Agency Young Faculty Award
  • NSF CAREER Award

Selected Publications

  • Z. Qian, F. Liu, Y. Hui, S. Kar and M. Rinaldi "Graphene as a Massless Electrode for Ultra-high-frequency Piezoelectric Nano Electro Mechanical Systems", Nano Letters, 15(7), 2015, 4599-4604 
  • Y. Hui, T. Nan, N.X. Sun, M. Rinaldi "High Resolution Magnetometer based on a High Frequency Magnetoelectric MEMS-CMOS Oscillator", IEEE/ASME Journal of Microelectromechanical Systems, 24(1), 2015, 134-143 
  • G. Hummel and M. Rinaldi "Switchable 2-Port Aluminum Nitride MEMS Resonator Using Monolithically Integrated 3.6THz Cut-Off Frequency Phase-
    Change Switches", Proceedings of the 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum, Denver, 2015, 706-708 
  • Y. Hui, Z. Qian, G. Hummel and M. Rinaldi "Pico-watts Range Uncooled Infrared Detector Based on a Freestanding Piezoelectric Resonant Microplate with Nanoscale Metal Anchors", Proceedings of the 2014 Solid-state Sensors, Actuators and Microsystems Workshop, Hilton Head Island,
    2014, 387-390
See Google Scholar Profile for all publications »

Related News

July 19, 2017

ECE Associate Professor Matteo Rinaldi awarded 2 patents for “Nano- and micro-electromechanical resonators”.

July 18, 2017

Dr. Zhenyun Qian from Professor Matteo Rinaldi 's group received the Best Student paper award at the 2017 IEEE Frequency Control Symposium and European Frequency and Time Forum on July 12 in...

November 9, 2016

ECE Assistant Professor Matteo Rinaldi (with Co-PI Professor Nicol McGruer) has received a $2.7M award from DARPA MTO to develop a magnetic-free “Microelectromechanical Resonant Circulator (MIRC)” orders of magnitude smaller than any existing implementation of circulators available to date.

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