Reference

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This page will contain links to reference material on safety in the lab, the SEM, equipment instructions, and other MEMS groups. Please give me suggestions of material to inculde (and the items themselves, if possible!)

Laboratory Information

General Laboratory Safety Information
Technical Talk Guidelines
Dry Oxidation, Ghandhi, Second Edition, (100) Si
Wet Oxidation, Ghandhi, Second Edition, (100) Si
Thin Oxidation, Ghandhi, Second Edition, (100) Si
Thermal Conductivity of Si, Ge, C, SiO2, from Sze

Equipment Operation Procedures

SEM Operation Quick Reference
SEM Cautions!
SEM Operation Manual
SEM Study Guide (For written exam)
MRC Manual Pumpdown Procedure
NPGS e-beam system

Processes and Spec Sheets

Shipley Megaposit SPR 220 Data Sheet

Interesting Links to MEMS Resources

Berkeley Sensors and Actuators Center
Stanford Microstructures and Sensors Lab
UCLA MEMS Home Page
University of Michigan MEMS Faculty
MEMS Clearinghouse
Dave Banks' Introduction to MEMS
Bill Trimmer's MEMS Page
TI Micromirror Device
MST NEWS (Newsletter on MEMS)
Web Elements (Physical properties of the elements)
E-beam reference at Cornell

MFL Home | Personnel | Programs | Facilities | Reference

Maintained by Nicol McGruer, mcgruer@ece.neu.edu.
Copyright (c) 2001 by Northeastern University. All rights reserved.