An Electrohydrodynamic Micropump

 

We have recently demonstrated an Electrohydrodynamic (EHD) based micropump on a flexible Parylene - C substrate. Parylene -C membranes with their excellent properties are rarely used yet are very promising candidates as flexible substrates. Low power on-chip micropumps are needed in various fields including biotechnology and cryogenic cooling. Furthermore, being fabricated on a flexible Parylene substrate, they can be utilized in commercial applications including wearable textiles.
 
Movie: AC EHD, DC EHD, DEP