Heterogeneous Integration of Two- and Three- Dimensional Suspended Gold Nanobridges on Flexible Parylene-C Substrate

Utilizing a 2D/3D micromachined platform, we have demonstrated heterogeneous integration of suspended 2D/3D gold nanobridges on a flexible parylene-C substrate.? Compared to planar nanodevices, the vertical suspended nanobridges have higher density and larger exposed surface areas and may potentially have enhanced sensitivity for sensing applications. ?This research presents novel vertical suspended nanostructures as potential candidates for nanosensors, nanosystems and heterogenous DNA detection.