ECE G244, MTM G260 Syllabus

ECE G244, MTM G260 Microelectromechanical Systems (Updated 10/6/08)
Fall 2008, Tuesday and Friday, 9:50-11:30 AM, 170F West Village

Professor George Adams
Office: 203 Snell Engineering
Phone: (617) 373-3826
FAX: (617) 373-2921
Hours: Mon. 4:00-5:00; Tues. 12:00-1:00,5:30-5:50; Thurs. 1:00-2:00, 5:30-5:50, or by appointment, email or phone.

Professor Nick McGruer
Office: 326 Dana
Phone: (617) 373-2066
FAX: (617) 373-8970
Hours: Monday, 9:15-10:30, Thursday, 9:45-11:00, or by appointment, e-mail or phone.

Text: Microsystem Design, Stephen D. Senturia, Kluwer Academic Publishers, 2001, ISBN 0-7923-7246-8.

Prerequisites: Graduate Standing in Engineering.

Grading: Homework 30%, Exam 30% total, Projects 40%

OVERVIEW: This course will give a broad introduction to MEMS technology, and will give students an opportunity to study the current literature and to design MEMS. The course will cover a sufficient selection of the huge number of technologies used in MEMS such that the fabrication and operation of most MEMS devices will be understandable. This will also provide background for student design projects in the second half of the course. Design projects will run concurrently with discussion of MEMS physical principles and MEMS case studies in class. Topics include microfabrication and process integration; modeling of electromechanical components; transduction technologies; selected coverage of elasticity, structures, dissipation, contact mechanics, friction, and fluids, noise; and case studies of microsystems.

Note: Microfabrication of MEMS devices will be covered in order to understand the major MEMS fabrication technologies and how they interact with system design strategies. Some aspects of process integration will be discussed. For more complete coverage of microfabrication see ECE 3626, IC Fabrication.

Course Outline (This may change somewhat!)

Week Subjects

Text Reference

Introduction to MEMS and the Course, Transducers Forward, Preface, Ch. 1, 2


MEMS Fabrication and Process Integration Ch. 3, 4

Lumped Modeling with Circuit Elements

Ch. 5


Energy Conserving Transducers Ch. 5, 6


System Dynamics, Stress, Strain, Structural Mechanics

Ch. 6


Stress, Strain, Structural Mechanics Ch. 8
Exam 1, Elasticity Ch. 8
Contact Mechanics, Dynamics and Vibration
Fluids, Thermal Ch. 9
Holiday!, Thermal
Fundamentals of Noise, Noise in Electronics
Case Studies, Thanksgiving! Ch. 13Ch. 11, 12
Exam 2, Case Studies Ch. 16
Project Presentations  
Finals Week: Project Presentations  

Co-operation on coursework: There is no restriction on cooperation, discussions, use of texts, library materials, or other sources while learning how to do any assignment. If a solution to a problem is found in the literature, students are expected to provide correct citations to that literature. For the individual homework assignments, every student is expected, at the end, to have worked through their own analysis or modeling work, to have run their own computer models, and to have written up their own work for submission. Under no circumstances is it permitted to present another student's work as one’s own. For term projects, a single report from each team is to be prepared. Cooperation in this case is an essential part of the assignment.

References on reserve in the library:

1. Analysis and Design of Analog Integrated Circuits, Third Edition, Gray and Meyer, Wiley, 1993, ISBN 0-471-57495-3. (This is a graduate-level electronics textbook.)

2. The Science and Engineering of Microelectronic Fabrication, Second Edition, Campbell, Oxford, 2001, ISBN 0-19-513605-5. (General Microfabrication Reference.)

3. Fundamentals of Microfabrication, Madou, CRC Press, 1997, ISBN 0-8493-9451-1. (Microfabrication for MEMS + some information on materials and devices.)

4. Micromachined Transducers Sourcebook, Kovacs, McGraw-Hill, 1998, ISBN 0-07-290722-3. (General MEMS reference with an emphasis on a very large number of transduction methods.)

5. Microelectronic Circuits, Fourth Edition, Sedra and Smith, Oxford, 1998, ISBN 0-19-511663-1. (Undergraduate electronics text.)

6. Arthur P. Boresi, Richard J. Schmidt, Omar M. Sidebottom, Advanced Mechanics of Materials, 5th Edition John Wiley, 1993. (Introduction to elasticity and graduate level structural mechanics.)

7. Singiresu S. Rao, Mechanical Vibrations, 4th Edition, Pearson Prentice Hall, 2004. (Introduction to vibrations of mechanical systems.)

8. Dudley D. Fuller, Theory and Practice of Lubrication for Engineers, 2nd Edition, Wiley-Interscience, 1984. (Fundamentals of lubrication theory.)

9. F.P. Beer, E.R. Johnston, J.T. DeWolf, Mechanics of Materials, 3rd edition, McGraw-Hill, 2002. (Undergraduate structural mechanics)

Other References


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