ECE g244, MTM G260, Homework #1, Due September 15, 2004

1. Find a paper by your advisor, or by Professor McGruer or Professor Adams if you don't have an advisor yet. Turn in the bibliographic information (reference) and the abstract.

2. Find nine MEMS related products/devices: 3 from National Labs, 3 from Start-ups and 3 from Big Industries. Identify the products (no more than a paragraph for each one) and the contacting address and/or phone number for their suppliers/developers.

3. This is fun, especially for those of you without much microfabrication background. I am not sure how reiable this site is yet. If the basic size SIMPLer dosen't load, try one of the other sizes.

Go to the SIMPLer web page at UC Berkeley and

1.choose the process "NMOS transistor" and press start.
2.Move the slider until you are on step number 1, and press "calculate cross-section"
3.Move the slider forward one step at a time, and after each step press "calculate cross-section".
4.Choose different cross-sections by clicking on the border of the layout area. How thick is the second oxide, and how many holes get punched through it in step 7?