ECE G244 and MTM G260, Microelectromechanical Systems (MEMS)
Departments of Electrical and Computer Engineering and Mechanical and Industrial Engineering
Northeastern University
Fall 2006, M-W, 9:50-11:30, 208 Kariotis

Prof. George Adams, adams@coe.neu.edu       Prof. Nick McGruer, mcgruer@ece.neu.edu
                                Phone: 617-373-3826         Phone: 617-373-2066, FAX: 617-373-8970

Syllabus

Week 1 Homework 1. Reading: Chapters 1 and 2.

Introduction to MEMS Devices Class Presentation Adams and McGruer (pdf) (ppt)
Micromirrors , Nanomechanical Devices, Nanomechanical Devices #2

Week 2 Homework 2. Project Assignment; Teaming Survey; Reading: Chapters 3 and 4.

Introduction to MEMS Fabrication (pdf) (ppt). Homework Solutions, page 1, page 2, page 3

Week 3 Homework 3. Homework 3 Notes.  
Week 4 Homework 4, part 1. Part 1 examples.  
Week 5 Homework 4, part 2.  
Week 6 Homework 5 and class material.  
Week 7 Homework 6. Class 12 material. Class 13 material.  
Week 8 Homework 7. Class 14 material.  
Week 9 Homework 8. Contact Mechanics ppt pdf  
Week 10 Homework 9. Fluids class material. ppt pdf  
Week 11 Homework 10.  
Week 12 Op amp Spec. Sheets. AD825 AD8021 NS6624 Noise Notes  
Week 13 Homework #11 Solutions  

Announcements:

Project Progress Reviews and Feedback:

1. Detailed outline of Final Report: Complete the outline and discuss it with Prof. Adams or Prof. McGruer no later than Wednesday, November 29. Make an appointment to discuss the project for 15-20 minutes. The outline should be 1-2 pages, with enough detail to show exactly what work is expected to be completed.

2. Review of 25 minute presentation: Review the presentation with Prof. Adams or Prof. McGruer no later than Dec. 5 for students presenting on Dec. 8, and no later than Dec. 8 for students presenting on Dec. 12.

A brief set of guidelines for technical talks.

Groups, Professor assignment for Progress Reviews and Feedback:

Note: Groups are encouraged to work with both Prof. Adams or Prof. McGruer on the projects; the following assignments are for the required reviews.

1. Microswitch (12/8); McGruer
2. Micromirror (12/8); Adams
3. Tunable capacitor (12/8); Adams
4. Micropump; McGruer
5. Microhotplate; McGruer
6. Accelerometer; McGruer
7. Gripper; Adams

Project Report and Presentation:

Presentation:

Each member of the group is expected to participate in the oral presentation.

Each presentation will be 25 minutes plus 5 minutes for questions.

Computers will be available, or you can use your own laptop. You can bring your powerpoint presentation on a memory key or a cd.

Students are expected to attend all presentations and will be involved in evaluating the presentations.

See http://www.ece.neu.edu/groups/mfl/reference/talkguidelines.pdf for suggestions on giving technical talks.

Final Report:

-The project final report should have an abstract with a short description of the key points of the device.

-It should also have a short introduction which should state the purpose of the device, have references to literature on similar devices, and a discussion of how the device in the project fits in with work previously done in the area.

-The main part of the report should describe the design of the device, again giving references to the literature from which ideas were drawn. This will include the fabrication, the packaging, modeling and simulation, and various other aspects of the design. For example, if a certain oscillator circuit or measurement circuit was used, this should be cited with a reference to the source.

-At some point the overall characteristics of the device should be summarized in a form similar to a spec. sheet for the device, and some comments about the market for the device should be made. (One place for the market discussion is in the introduction.)

-Finally some conclusions should be drawn, both about the performance of the device as designed relative to existing solutions, and as to what work would be done in the future if the project were to continue.

-There is no minimum or maximum page length. However the report should be Clear, Concise, and Complete. There is no need to take more space than is necessary to give the "reader" a good understanding of your project. Do not aim your report to Professors Adams and McGruer who are already familiar with your work. Instead aim your report at a reader who, although familiar with MEMS, does not know anything about your project. -Submit two copies of your report in class no later than the time of your presentation

Grades

Upcoming speakers:

Thursday Dec 7 Prof. Steven Chou / Electrical Engineering / Princeton Title TBA

PSpice:

PSpice is available on NUnet connected PCs under College of Engineering

Download the student version of PSpice Here. (pc version)
To install unzip to some folder (remember where), then run setup.exe. Be sure to install the schematic editor.

Inspecting a microrelay.