ECE 1406, Homework #5, Due May 6, 2003

1. 5.3, text.

2. 5.1, text, a and b only.

3. 5.10 (see page 116 for a discussion of range in PR, assume an m of 6 (6X the straggle) for this implantation)

4. 5.11

5. 5.14 This is one way of making SOI wafers.

6. 5.15