$           Full process EXAMPLE, all process parameters must be set!!!

$           Initialize 1D grid...lines at x=0 and x=1 um are the default;
$           gridlines are from y=0 to y=2 um with a spacing of 0.01 um
$           Dollar signs indicate comments.
LINE Y      LOC=0   SPAC=0.01
LINE Y      LOC=2.5   SPAC=0.01    

$           Tracks defects for modelling of oxidation enhanced diffusion
$           and defect enhanced diffusion. This makes a fairly big difference
$           in the results.
Method      TWO.DIM

$           sets-up a <100> n-type Si wafer with uniform phosphorus doping
$           then asks for a printout of the "grid"
Initialize  <100> phosphorus=1E15 LINE.DAT

$           Implant Phosphorus
$           The dose is in units of cm-2.
$           The energy is in units of keV.
$           pearson refers to the Pearson IV distribution, which is
$           usually more accurate than the gaussian distribution for implants.
Implant     phosphorus dose=3E12 energy=100 pearson 

$           Grow the field oxide
Diffusion   Time=20 Temperature=1100 WETO2

$           prints existing layers (gives oxide thickness on screen)
Select      Z=1.0
Print       layers x.v=0

$           Etches away all the oxide (if not commented out!!!)
Etch        oxide all

$           Grow the gate oxide
Diffusion   Time=20 Temperature=1050 DRYO2

$           prints existing layers
Select      Z=1.0
Print       layers x.v=0

$           Deposit polysilicon (if not commented out!!!)
$ Deposit     Polysilicon thickness=0.5

$           Active area implant
Implant     BF2 dose=1E15 energy=50 pearson

$           Perform the activation/anneal/drive-in diffusion
Diffusion   Time=15 Temperature=1050 WETO2

$           selects the variable to be plotted and the label for the graph
Select      Z=log10(Boron) label=LOG(Concentration)

$           plots "Z" using a dashed line at x=0 um
Plot.1d     x.value=0 line.typ=1 top=19.5 bottom=14.5

$           selects the variable to be plotted and the label for the graph
Select      Z=log10(Phosphorus) label=LOG(Concentration)

$           plots "Z" using a dashed line at x=0 um
Plot.1d     x.value=0 line.typ=3 ^AXES ^CLEAR color=3

$           prints existing layers
Select      Z=1.0
Print       layers x.v=0

Stop        End example