Plasma Engineering Lab, Prof. J. Hopwood

| Mission | People | Micromachined ICP | MSRR Microplasma | Ionized Physical Vapor Deposition | ICP Etching | Micro Gas Analyzer |

Mission

The members of the Plasma Engineering Lab design and physically characterize novel plasma generators and plasma processes. Under the direction of Professor Jeff Hopwood , the Lab concentrates on high-density inductively coupled plasma technology. Current projects include Ionized-PVD, Inductively Coupled Plasma Etching of high aspect ratio microstructures, and micromachined devices for forming microplasmas.

People

Faculty:

Prof. Hopwood

Post doc

Neil Mao

Graduate Students:

Feng Qian, MSEE 1995
Mike Dickson, MSEE 1997 (now at Intel)
Feng Zhou, MSEE 1997 (now at Micron)
Gang Zhong, MSEE 1998 (now at Avanti)
Yu Yin, MSEE 2001 (now at Teradyne)
Kai Tao, PhD 2001 (now at Synopsis)
Daisheng (Neil) Mao, PhD 2003 (Post-doc at NU)
Xiaoji Yang, PhD 2003 (now at KLA-Tencor)
Olga Minayeva, PhD 2002 (Post-Doc at Old Dominion)
Felipe Iza, PhD 2004 (Post-doc at Postech)
Maria Ko, MSEE 2002 (now at TSMC)
John Nwagbaraocha
Jun Xue
Naoto Miura

Undergraduates

Jason Messier, BSEE 1997 (now at Teradyne)
Matthew Maffucci, BSEE 2001
Sidney Rodrigues, BSEE 2001
David Williamson, BSEE 2000 (now at Raytheon)
David Esposito, BSEE 2004
Istvan Rodriguez (Class of 2006)

Prof. Hopwood's Home Page
Electron Devices Group Home Page

Plasma Engineering Lab
c/o J. Hopwood
436 Dana Research Center
Northeastern University
Boston, Massachusetts 02115
(617) 373-3059