| Mission | People | Micromachined ICP | MSRR Microplasma | Ionized Physical Vapor Deposition | ICP Etching | Micro Gas Analyzer |


Mission

The members of the Plasma Engineering Lab design and physically characterize novel plasma generators and plasma processes. Under the direction of Professor Jeff Hopwood , the Lab concentrates on high-density inductively coupled plasma technology. Current projects include Ionized-PVD, Inductively Coupled Plasma Etching of high aspect ratio microstructures, and micromachined devices for forming microplasmas.


People

Faculty:

Post doc

Graduate Students:

Undergraduates




Prof. Hopwood's Home Page
Electron Devices Group Home Page



Plasma Engineering Lab
c/o J. Hopwood
436 Dana Research Center
Northeastern University
Boston, Massachusetts 02115
(617) 373-3059