$Title Example 5.2-Simple Implant (without gate oxide) Comment Initialize 1D grid...lines at x=0 and x=1 um are the default LINE Y LOC=0 SPAC=0.02 LINE Y LOC=2 SPAC=0.02 Initialize <100> BORON=1E16 LINE.DAT IMPLANT ARSENIC ENERGY=60 DOSE=5E15 TILT=7 $ 60keV, 5e15 per cm2, 7 degrees of tilt Select Z=LOG10(Arsenic) LABEL=LOG10(As) Plot.1d x.value=0 line.typ=5 DIFFUSION TIME=30 TEMP=550 NITROGEN DIFFUSION TIME=10 TEMP=1000 NITROGEN Select Z=LOG10(Arsenic) LABEL=LOG10(As) Plot.1d x.value=0 ^AXES ^CLEAR line.typ=1 $replots the As concentration without clearing the previous plot $using a solid line and the same axes Stop End example 1