$Title Example 3.2-Predeposition Diffusion of Phosphorous (in tsuprem4) $Comment Initialize 1D grid...lines at x=0 and x=1 um are the default; $ gridlines are from y=0 to y=1 um with a spacing of 0.01 um LINE Y LOC=0 SPAC=0.01 LINE Y LOC=1 SPAC=0.01 Initialize <100> Boron=1E16 LINE.DAT $ sets-up a <100> p-type Si wafer with uniform boron doping $ then asks for a printout of the "grid" $Comment Diffuse Phosphorous Diffusion Time=20 Temperature=1050 Phosphorus=1e20 + Movie="select z=log10(phosphorus); plot.1D X.V=1.0" Select Z=log10(Phosphorus) label=LOG(P_CONC) $ selects the variable to be plotted and the label for the graph Plot.1d x.value=0 line.typ=5 $ plots "Z" using a dashed line at x=0 um Stop End example 1