Problems from Chapter 4:
1) Problem 1.
2) Problem 2
3) Problem 3
4) Problem 4
5) Problem 6...see equation (4.12) and assume that hg>>ks.
Some research has been aimed at using plasmas
to oxidize silicon. Problem 5 suggests that the oxide growth rate
may be enhanced by
creating an environment of O2-
using an oxygen plasma source. Actually the true goal of the plasma
oxidation is to grow a reasonably thick oxide
at or near room temperature such that dopant
redistribution is essentially eliminated
6) Calculate the time it would take (in years!) to grow a 0.1 um thick SiO2 layer at room temperature in air (~23% oxygen, 77% nitrogen). (Hint: extrapolate Figs. 4.2 and 4.3 down to room temperature.)
7) Problem 14 (note that the tsuprem4 file for Example 4.2 is available
from the ece3626 homepage)