1995 IEEE INTERNATIONAL ELECTRON DEVICES MEETING
SCHEDULE OF TECHNICAL SESSIONS
SUNDAY, DECEMBER 10, 9:00 a.m. - 5:30 p.m
Short Course: NVRAM Technology and Applications
Course Organizer: Seiki Ogura, IBM, East Fishkill, NY
- NAND Flash Technology and Chip Design - Instructor: Fujio Masuoka, Tohoku
University, Japan
- NVRAM Technology, NOR Flash Design and Multi-Level Flash - Instructor:
Stefan Lai, Intel Corporation, Santa Clara, CA
- Non-Volatile Memory Based on Solid State Mass Storage Technologies -
Instructor: Daniel Guterman, SunDisk Corporation, Santa Clara, CA
- Embedded FLASH: Application, Technology and Design - Instructor: Clinton
Kuo, Motorola, Austin, TX
Short Course: - Technologies for Portable Systems
Course Organizer: Anantha Chandrakasan, Massachusetts Institute of
Technology, Cambridge, MA
- Portable Technologies: A System Perspective, Instructor: Erik P. Harris,
IBM Watson Research Center,
Yorktown Heights, NY
- Low-Power Baseband Electronics - Instructor: Akira Matsuzawa, Matsushita
Electric Industrial Co., Ltd.,
Osaka, Japan
- Low Power RF Technology and Design - Instructor: William R. Eisenstadt,
University of Florida, Gainesville,
FL
- Low Power Display Technology for Portable Systems - Instructor: Alan Lewis,
Xerox PARC, Palo Alto, CA
MONDAY, DECEMBER 11, 9:00 a.m.
Plenary Session
- Consumer Electronics as the Technology Driver, Yoshitaka Hashimoto, Sony
Corporation
- Smart Power Technology and the Evolution from Protective Umbrella to
Complete System, Bruno Murari, SGS-Thomson Microelectronics
- CMOS Image Sensor: Electronic Camera on a Chip, Eric Fossum, NASA Jet
Propulsion Laboratory
MONDAY, DECEMBER 11, 1:00 p.m.
Session 2: CMOS Devices and Reliability - Hot Carriers and Device Reliability
- Statistical Variation of NMOSFET Hot-Carrier Lifetime and its Impact on
Digital Circuit Reliability
- Hot-Carrier-Induced Gate Capacitance Variation and Its Impact on DRAM
Circuit Functionality
- Oxide-Field Dependence of the NMOS Hot-Carrier Degradation Rate and Its
Impact on AC-Lifetime Prediction
- Accurate Measurements for Lateral Distribution of Interface Traps by Charge
Pumping and Capacitance Methods
- LDD Charge Pumping - Direct Measurement of Interface States in the Overlap
Region
- A Comparative Study of Hot-Carrier Induced Light Emission and Degradation in
Bulk and SOI MOSFETs
Session 3: Integrated Circuits - Low Voltage/Low Power CMOS
- Reducing Operating Voltage from 3,2, to 1 Volt and Below - Challenges and
Guidelines for Possible Solutions (Invited Paper)
- TFSOI CMOS Technology for Sub-1V Microcontroller Circuits
- Optimization of Quarter Micron MOSFETs For Low Voltage/Low Power
Applications
- Intra-Die Device Parameter Variations and Their Impact on Digital CMOS
Gates at Low Supply Voltages
- Reversal of Temperature Dependence of Integrated Circuits Operating at Very
Low Voltages
- Discussion Session: Power/Voltage: How Low is Low?
Session 4: Modeling and Simulation - Process Modeling
- Ion Implantation and Transient Enhanced Diffusion (Invited Paper)
- Modeling Arsenic Activation and Diffusion During Furnace and Rapid Thermal
Annealing
- Physically Based Modeling of Boron Diffusion in Thin Gate Oxides: Effects
of F, H2, N, Oxide Thickness and Injected Si Interstitials
- 3D Modeling of Sputter and Reflow Processes for Interconnect Metals
- A Sputter Equipment Simulation System Including Molecular Dynamical Target
Atom Scattering Model
- Three Dimensional PVD Virtual Reactor for VLSI Metallization
- Physical Etching/Deposition Simulation with Collision-Free Boundary
Movement
- Simulation Approach for Achieving Configuration Independent Poly-Silicon
Gate Etching
Session 5: Device Interconnect Technology - Advanced Memory Dielectrics
- Ta2O5 Capacitors' Dielectrics Material for Giga-Bit DRAM (Invited Paper)
- Novel Stacked Capacitor Technology for 1Gbit DRAMS with CVD-(Ba,Sr)TiO3 Thin
Films on a Thick Storage Node of Ru
- An ECR MOCVD (Ba,Sr)TiO3 Based Stacked Capacitor Technology with
RuO2/Ru/TiNTiSix Storage Nodes for Gbit-Scale DRAMs
- Effects of Scaling Thickness and Effective Doping Level on the
Ferroelectric Thin Film Capacitor Memory Operation
- Characteristics of the PZT Thin Film Device Fabricated on the Single Grain
- Discussion Session
Session 6: Emerging Technologies
- New Generation MOS Controlled Power Devices and Their Applications (Invited Paper)
- Integrated Inductors for Low Cost Electronic Packages (Invited Paper)
- Electronic Sensing of the Taste of Beer and Other Foodstuffs (Invited Paper)
Session 7: Detectors, Sensors and Displays - Image Sensors
- High Resolution Tri-Linear Colour TDI CCD Image Sensor with Programmable
Responsivity Gain
- An mK x nK Modular Image Sensor Design
- Optical Limitation to Cell Size Reduction in IT-CCD Image Sensors
- Characterization of Metal Contaminiation in CCD Image Sensors
- CCD-based Sensor Array for Magnetic Pattern Recognition
- A Fingerprint Opto-Detector Using Lateral Bipolar Phototransistors in a
Standard CMOS Process
- A Solid-State Imager Joined to an Avalanche Multiplier Film with Micro-bump
Electrodes
Session 8: Quantum Electronics and Compound Semiconductor Devices -
Advanced Field Effect Transistors
- 11.5V-Operation GaAs Spike-Gate Power FET with 65% Power-Added Efficiency
- 1.2V Operation 1.1W Heterojunction FET for Portable Radio Applications
- High-Efficiency Dual-Gate InGaAs Pseudomorphic HEMTs for High Power
Amplifiers Using Single-Voltage Supply
- Ultra-High-Speed InAlAs/InGaAs HEMT ICs Using pn-Level-Shift Diodes
- 0.1-um p+ -GaAs Gate HJFETs with ft=121 GHz Fabricated using All
Dry-etching
and Selective MOMBE Growth
- A New Physical Model for the Kink Effect on InAlAs/InGa/As HEMTs
- High-Transconductance Normally-Off GaN MODFETs
- Discussion Session
Session 9: Vacuum Electronics - Microwave Tubes
- Application of the "Klevafella" Permanent Magnet Focusing System to Linear
Beam Microwave Tubes
- A CHI Wiggler Ubitron Amplifier Experiment: Wiggler Characterization
- The Development of High Frequency, Megawatt Gyrotrons for ITER
- Window-Temperature Measurements on a High-Power Gyrotron with an Internal,
Quasi-Optical Converter
- Design of Two Low Voltage, Axially-Modulated, Cusp-Injected Gyrotron
Amplifier Experiments
- Stable 200kW Second-Harmonic Gyro-TWT Amplifier Operation
- Initial Operation of a 100MW Fundamental Frequency Gyroklystron
TUESDAY, DECEMBER 12, 9:00 a.m.
Session 10: Device Interconnect Technology - Evolutionary Interconnect Technology
- Interconnect Scaling - The Real Limiter to High Performance ULSI (Invited
Paper)
- A Scaling Scheme for Interconnect in Deep-Submicron Processes
- Interconnect Capacitances, Crosstalk, and Signal Delay in Vertically
Integrated Circuits
- Discussion Session
- Excellent Electro/Stress-Migration-Resistance Surface-Silicide Passivated
Giant-Grain Cu-Mg Alloy Interconnect Technology for Giga Scale Integration (GSI)
- Low Temperature, Low Resistivity Sub-Half Micron Via/Interconnect Structure
Using Reaction of Al-Alloys and Germane
Session 11: Integrated Circuits - Flash Memory Technology
- A Novel Dual String NOR (DuSNOR) Memory Cell Technology Scalable to the
256Mbit and 1Gbit Flash Memories
- A New Cell Structure for Sub-Quarter Micron High Density Flash Memory
- Multi-Level Flash/EPROM Memories: New Self-Convergent Programming Methods
for Low-Voltage Applications
- A Novel Side-Wall Transfer-Transistor Cell (SWATT Cell) for Multi-level
NAND EEPROMs
- Novel Electron Injection Method Using Band-to-Band Tunneling Induced Hot
Electron (BBHE) for Flash Memory with a P-Channel Cell
- Substrate-Current-Induced Hot Electron (SCIHE) Injection: A New Convergence
Scheme for Flash Memory
- Discussion Session: Flash Memory Cell Scaling Issues for 256Mbit Generation
and Beyond
Session 12: Modeling and Simulation - Hot Carrier Effects and Monte Carlo Simulation
- The Numerical Simulation of Substrate and Gate Currents in MOS and EPROMs
- Characterization and Modeling of Hot-Carrier Luminescence in Silicon
n+/n/n+ Devices
- New Monte Carlo Simulation for Polystalline Silicon Thin-Film Transistor
- Hot Carrier Effects in Short MOSFETs at Low Applied Voltages
- Monte Carlo Study of Sub-Band-Gap Impact Ionization in Silicon Field-Effect
Transistors
- Discussion Session
Session 13: CMOS Devices and Reliability - Plasma Damage and Gate Oxide Reliability
- Role of Temperature in Process-Induced Charging Damage in Sub-micron CMOS
Transistors
- High Density Plasma Etch Induced Damage to Thin Gate Oxide
- Effects of Oxide Exposure, Photoresist and Dopant Activation on the Plasma
Damage Immunity of Ultrathin Oxides and Oxynitrides
- A New Gate Oxide Lifetime Prediction Method Using Cumulative Damage Law and
Its Applications to Plasma-Damaged Oxides
- The Impact of Nitrogen Profile Engineering on Ultra-Thin Nitrided Oxide
Films for Dual-Gate CMOS ULSI
- Short Channel Enhanced Degradation During Discharge of Flash EEPROM Memory
Cell
Session 14: Solid State Devices - ESD Protection, Discrete Power and Bipolar Devices
- Bipolar SCR ESD Protection Circuit for High Speed Submicron Bipolar/BiCMOS
Circuits
- A Hot-Carrier Triggered SCR for Smart Power Bus ESD Protection
- Efficient NPN Operation in High Voltage NMOSFET for ESD Robustness
- A Planar MOS-Gated AC Switch Structure
- High Power 4H-SiC Static Induction Transistors
- Correlation of Low-Frequency Noise and Emitter-Base Reverse-Bias Stress in
Epitaxial Si- and SiGe-base Bipolar Transistors
Session 15: Quantum Electronics and Compound Semiconductor Devices -
Quantum and Novel Devices
- Comparison of Experimental and Theoretical Results of Room Temperature
Operated Single Electron Transistor Made by STM/AFM Nano-Oxidation Process
- Single Hole Silicon Quantum Dot Transistors for Complementary CMOS Circuits
- Electron Transport Properties in InAs Self-Assembled Quantum Dot HEMTs
- A Novel Semimetallic Quantum Well FET
- Novel Current-Voltage Characteristics in an InP-Based High Electron
Mobility Resonant-Tunneling Transistor and their Circuit Applications
- In-Situ Ga2O3 Process for GaAs Inversion/Accumulation Device and Surface
Passivation Applications
Session 16: Vacuum Electronics - Field Emitter Arrays and Photocathodes
- Field-Emitter-Array Development for Microwave Applications
- Tower Structure Si Field Emitter Arrays with Large Emission Current
- A Robust Gated-Field-Emission Triode
- Scaling-down of Cone-like Field Emitter Using LOCOS
- Volcano-Shaped Field Emitters for Large Area Displays
- High-Performance Negative Electron Affinity Photocathodes for High
Resolution Electron Beam Lithography and
Metrology
TUESDAY, DECEMBER 12, 2:15 p.m.
Session 17: CMOS Devices and Reliability - Advanced CMOS Devices and Reliability
- A Scaled 1.8V,0.18 m Gate Length CMOS Technology: Device Design and
Reliability Considerations
- Device Drive Current Degradation Observed with Retrograde Channel Profiles
- Reverse Short Channel Effect and Channel Length Dependence of Boron
Penetration in PMOSFETs
- The Effect of Source/Drain Processing on the Reverse Short Channel Effect
of Deep Sub-Micron Bulk and SOI NMOSFETs
- A 0.1 m Inverted-Sidewall Recessed-Channel (ISRC) NMOSFET for High
Performance and Reliability
- Performance and Reliability Optimization of Ultra Short Channel CMOS Device
for Giga-bit DRAM Application
- A High Performance 0.1 m MOSFET with Asymmetric Channel Profile
Session 18: Device Interconnect Technology - Advanced Silicide and Metallization Technologies
- A New Cobalt Salicide Technology for 0.15 m CMOS Using High-Temperature
Sputtering and In-Situ Vacuum Annealing
- Leakage Mechanism and Optimized Conditions of Co Salicide Process for
Deep-submicron CMOS Devices
- Nitrogen-Doped Nickel Monosilicide Technique for Deep Submicron CMOS
Salicide
- Novel Contamination Restrained Silicidation Processing Using Load-Lock
LPCVD-Films and Lightly Doped Deep Drain (LD3) Structure for Deep Submicron Dual Gate CMOS
- A Comparative Study of CVD TiN and CVD IaN Diffusion Barriers for Copper
Interconnection
- Completely Planarized W Plugs Using MnO2 CMP
- In Situ CMP Monitoring Technique for Multi-layer Interconnection
-Fully Planarized Four-Level Interconnection with Stacked Vias Using CMP of
Selective CVD-A1 and Insulator and its Application to Quarter Micron Gate Array LSIs
Session 19: Modeling and Simulation - Back-End Process Modeling
- CMOS Process Design for Minimization of IC Power Consumption Using TCAD (Invited Paper)
- The Implications of Self-Consistent Current Density Design Guidelines
Comprehending Electromigration and Joule Heating on Interconnect Technology Evolution
- Thermal Analysis of Vertically Integrated Circuits
- Simulation and Modeling of the Effect of Substrate Conductivity on Coupling
Inductance
- "NET-AN" a Full Three-Dimensional Parasitic Interconnect Distributed RLC
Extractor for Large Full Chip Scale Applications
- Using a Statistical Metrology Framework to Identify Random and Systematic
Sources of Intra-Die ILD Thickness Variation for CMP Processes
- Finite Element Optimization of a MOSFET Structure: The Role of Interlayer
Material for Residual Stress Reduction
Session 20: Solid State Devices - Novel Devices and Techniques
- Si/SiG High-Speed Field-Effect Transistors (Invited Paper)
- Novel Poly-Si-Capped Poly-Si1-XGex Thin-Film Transistor
- Enhanced Hole Mobilities in Surface-Channel Strained-Si p-MOSFETs
- Volatile and Non-Volatile Memories in Silicon with Nano-Crystal Storage
- Impact of Coulomb Blockade on Low-Charge Limit of Memory Device
- Reference Voltages and Their Stress-Induced Changes in Thin Film
Transistors as Determined by Charge Pumping
- Silicon Film Thickness and Material Dependence of "Reverse Short Channel
Effect" for SOI NMOSFETs
Session 21: Integrated Circuits - ESD and Other Specialized Structures
- A Novel On-Chip Electrostatic Discharge (ESD) Protection for Beyond 500MHz
DRAM
- ESD Protection for Deep-Submicron CMOS Technology Using Gate-Couple
CMOS-Trigger Lateral SCR Structure
- Substrate Triggering and Salicide Effects on ESD Performance and Protection
Circuit Design in Deep Submicron CMOS Processes
- On-State Reliability of Amorphous Silicon Antifuse
- A Neuron MOS Transistor-Based Multiplier Cell
Session 22: Quantum Electronics and Compound Semiconductor Devices - OptoElectronics
- Novel Components for Wavelength Division Multiplexed Systems Based on
Monolithic Multiplexer/Amplifier Integration (Invited Paper)
- Low-Noise 650nm-Band AlGaInP Visible Lasers with Highly-Doped Saturable
Absorbing (HDSA) Layer
- 100mW High-Power Angled-Stripe Superluminescent Diodes with a Real
Refractive Index Guided Self-Aligned Structure
- Device Modelling of Polymer Light Emitting Diodes
- Resonant-Cavity Photodetectors (Invited Paper)
- A High Performance InAlAs/InGaAs/InP HEMT/MSM-based OEIC Photoreceivers
- A Selective Epitaxial SiGe/Si Planar Photodetector for Si-Based OEICs
- Passive Optical Alignment of Stacked Multi-Fiber Tapes to a Two-Dimensional
Surface-Emitting Laser Array
Session 23: Detectors, Sensors and Displays - Micromechanical Devices and Technologies
- A Low-Voltage Bulk-Silicon Tunneling-Based Microaccelerometer
- Lateral Backward Diodes as Strain Sensors
- A Monolithic Thermal Inkjet Printhead Utilizing Electrochemical Etching and
Two-Step Electroplating Techniques
- New Convergence Scheme for Self-Consistent Electromechanical Analysis of
iMEMS
- Embedded Micromechanical Devices for the Monolithic Integration of MEMS
with CMOS
- A Merged MEMS-CMOS Process Using Silicon Wafer Bonding
TUESDAY, DECEMBER 12, 8:00 p.m.
Session 24 and 25: 1995 IEDM Evening Panel Discussion
- Technology of the Future or Nano-Niche?
Panel Moderator: Paul Peercy, SEMI/SEMATECH, Austin, TX
- FLASH or DRAM: Memory Choice for the Future?
Panel Moderator: Jim Prendergast, Motorola Semiconductor, Phoenix, AZ
WEDNESDAY, DECEMBER 13, 9:00 a.m.
Session 26: CMOS Devices and Reliability - SOI Devices
- Body Charge Related Transient Effects in Floating Body SOI NMOSFETs
- Suppression of the Parasitic Biopolar Effect in Ultra-Thin-Film
MOSFETs/SIMOX by Ar Ion Implantation into Source/Drain Regions
- SOI MOSFET Design for All-Dimensional Scaling with Short Channel, Narrow
Width and Ultrathin Films
- Substantial Advantages of Fully-Depleted CMOS/SIMOX Devices Over Bulk-CMOS
Devices as Low-Power High-Performance VLSI Components
- Novel Device Lifetime Behavior and Hot-Carrier Degradation Mechanisms Under
VGS = VTH Stress for Thin-Film SOI nMOSFETs
- A Front Gate Charge Pumping Technique for Measuring Both Interfaces in
Fully Depleted SOI/MOSFETs
- Dynamic Aging of CMOS SOI Transistors in Circuit Operation
Session 27: Device Interconnect Technology - Advanced Memory Technology
- A 0.54 m2 Self-Aligned, HSG Floating Gate Cell (SAHF Cell) for 256Mbit
Flash Memories
- A Scalable Low Power Vertical Memory
- 0.228- m2 Trench Cell Technologies with Bottle-Shaped Capacitor for 1G-bit
DRAMs
- A Self-Aligned Contact Technology Using Anisotropical Selective Epitaxial
Silicon for Giga-Bit DRAMs
- Novel, High-Performance Polysilicon Heterostructure TFTs Using P-I-N
Source/Drains
- Bipolar Installed CMOS Technology Without Any Process Step Increase for
High Speed Cache SRAM
Session 28: Device Interconnect Technology - Isolation, Gate Dielectrics and
Process Integration
- Trench Isolation for 0.45 m Active Pitch and Below
- A New Leakage Component Caused by the Interaction of Residual Stress and
the Relative Position of Poly-Si Gate at Isolation Edge
- Characterization and Optimization of NO-Nitrided Gate Oxide by RTP
- A 0.25 m CMOS Technology with 45 NO-Nitrided Oxide
- Low Contact Resistance Metallization for Gigabit Scale DRAMs Using
Fully-Dry Cleaning by Ar/H2 ECR Plasma
- Self-Aligned Metal/IDP Si Bipolar Technology Featuring 14 ps/70 GHz
Session 29: Integrated Circuits - High Frequency Si Technologies
- A High Performance MOSFET Design with Highly Controllable Gate Length and
Low RC Delay Multilevel Interconnects Technology for High Speed Logic Devices
- Active Substrate Membrane Probe Card
- Extended Study of Crosstalk in SOI-SIMOX Substrates
- Monolithic Planar RF Inductor and Waveguide Structures on Silicon with
Performance Comparable to Those in GaAs MMIC
- An Assessment of the State-of-the-Art 0.5 m Bulk CMOS Technology for RF
Applications
- Monolithic 26 GHz and 40 GHz VCOs with SiGe Heterojunction Biopolar
Transistor
- Discussion Session: Technologies and Tradeoffs for High Performance
Passive Elements in Si
Session 30: Solid State Devices - Advanced Bipolar Devices
- SiGe HBT Technology: Device and Application Issues (Invited Paper)
- Very-High fT and fMAX Silicon Bipolar Transistors Using
Ultra-High-Performance Super Self-Aligned Process Technology for Low-Energy and
Ultra-High-Speed LSI's
- SiGe Base Biopolar Technology with 74 GHzfmax and 11 ps Gate Delay
- Enhanced SiGe Heterojunction Bipolar Transistor Process with 160 GHz-fmax
- Selective-Epitaxial Base Technology with 14ps ECL-GAte Delay, for Low Power
Wide-Band Communiction Systems
- Integratable and Low Base Resistance Si/Si1-xGex Heterojunction Bipolar
Transistors Using Selective and Non-Selective Rapid Thermal Epitaxy
- Neutral Base Recombination in Advanced SiGe HBTs and Its Impact on the
Temperature Characteristics of Precision Analog Circuits
Session 31: Modeling and Simulation - Compound Semiconductor Device Simulation
- Design of Si/SiGe Heterojunction Complementary Metal-Oxide-Semiconductor
Transistors
- Monte Carlo Simulation of Electron Transport in Strained SiSi1-xGex
n-MOSFETs
- Numerical Simulation of the Temperature Dependence of Band-Edge
Photoluminescence and Electroluminescence in Strained-Si1-xGex/Si Heterostructures
- Modeling the Effects of Traps on the IV-Characteristics of GaAs MESFETs
- A Novel Implementation of Noise Analysis in General-Purpose PDE-Based
Semiconductor Device Simulators
- Rigorous Two-Dimensional Physical Modeling of Noise Performance of Sub-0.25m Gate-Length FETs
Session 32: Quantum Electronics and Compound Semiconductor Devices - Heterojunction
Bipolar Transistors
- High Power AlGaAs/GaAs HBT and Their Applications to Mobile Communication
Systems (Invited Paper)
- InGaP/GaAs Power HBTs with Low Bias Voltage
- High-Efficiency X-Band GaInP/GaAs HBT MMIC Power Amplifier for Stable Long
Pulse and CW Operation
- Chirped Superlattice Hot Electron Double Heterojunction Bipolar Transistor
with High Power Performance at X-Band
- Hybrid Digital/Microwave HBTs for >30 Gb/s Optical Communications Circuits
- 253-GHz fMAX AlGaAs/GaAS HBT with Ni/Ti/Pt/Ti/Pt-Contact and L-Shaped Base
Electrode
- Model for Degradation of GaAs/AlGaAs HBTs Under Temperature and Current
Stress
- Reliability Investigation of InGaP/GaAs HBTs
Session 33: Detectors, Sensors and Displays - Display and Thin Film
Transistor Technologies
- Electroluminescent Devices Using Polymer Blend Thin Films
- Hydrogen Passivation Effects of Performance of Visible Thin-Film
Light-Emitting Diodes (TFLEDS)
- Fabrication of Low-Temperature Bottom-Gate Poly-Si TFTs on Large-Area
Substrate by Linear-Beam Excimer Laser Crystallization and Ion Doping Method
- A PN Gate Polysilicon Thin Film Transistors
- A 2.4-in Driver-Integrated Full Color Quarter VGA (320x3x240) poly-Si TFT
LCD by a Novel Low Temperature Process Using Combination ELA and RTA Technology
- VGA Driving with Low Temperature Processed Poly Si TFTs
WEDNESDAY, DECEMBER 13, 1:30 p.m.
Session 34: CMOS Devices and Reliability - Ultra-Thin Dielectrics and
Reliability
- Performance and Reliability Concerns of Ultra-thin SOI and Ultra-thin Gate
Oxide MOSFETS (Invited Paper)
- Direct Tunneling N2O Gate Oxynitrides for Low-Voltage Operation of Dual
Gate CMOSFETs
- Highly-Reliable Gate Oxide Formation for Giga-Scale LSIs by Using Closed
Wet Cleaning System and Wet Oxidation with Ultra-Dry Unloading
- Impact of Surface Proximity Gettering and Nitrided Oxide Side-Wall Spacer
by Nitrogen Implantation on Sub-Quarter Micron CMOS LDD FETs
- A Consistent Model for the Thickness Dependence of Intrinsic Breakdown in
Ultra-thin Oxides
- High Endurance Ultra-Thin Tunnel Oxide for Dynamic Memory Application
A New Degradation Mode of Scaled p+ Polysilicon Gate pMOSFETs Induced by
Bias Temperature (BT) Instability
Session 35: Device Interconnect Technology - Technologies for Low-Voltage/Low
Power Applications in the Sub Quarter Micron Regime
- Back Gated CMOS on SOIAS for Dynamic Threshold Voltage Control
- Threshold Voltage Adjustment in SOI MOSFETs by Employing Tantalum for Gate
Material
- Controlling the Device Field Edge to Achieve a Low Voltage/Low Power TFSOI
Technology
- Giga-bit DRAM Cell with Low Capacitance and Low Resistance Bit-lines on
Buried MOSFETs and Capacitors by Using Bonded SOI Technology
- W-Polycide Dual-Gate Structure for Sub-1/4 Micron Low-Voltage CMOS
Technology
- Re-Examination of Indium Implantation for a Low Power 0.1 um Technology
Session 36: Integrated Circuits - Advanced DRAM and SRAM Devices
- Giga-Bit Scale DRAM Cell with New Simple Ru/(Ba,Sr)TiO3/Ru Stacked
Capacitors Using X-ray Lithography
- A Process Technology for a 1 Giga-Bit DRAM
- Isolation-Merged Bit Line Cell (IMBC) for 1Gb DRAM and Beyond
- Well Concentration: A Novel Scaling Limitation Factor from DRAM Retention
Time and Its Modeling
- Using n-Channel TFTs without LDD Structures for High Stabilities of 1.2-V
High-Density SRAMS
- A 0.35 m ECL_CMOS Process Technology on SOI for 40ps Logic and 1ns
Mega-bits SRAMs
- High Performance 0.25 m SRAM Technology with Tungsten Interpoly Plug
Session 37: Modeling and Simulation - Compact MOS Modeling
- A Computationally Efficient Model for Inversion Layer Quantization Effects
in Deep Submicron N-Channel MOSFETs
- A Physical Compact MOSFET Model, Including Quantum Mechanical Effects, for
Statistical Circuit Design Applications
- Circuit Sensitivity Analysis in Terms of Process Parameters
- Efficient Non-Quasi-Static MOSFET's Model for Circuit Simulation
- A Physically Based Device Model for Fully Depleted and Nearly Fully
Depleted SOI MOSFET
- A Physical-Based Analytical Turn-On Model of PolySilicon Thin Film
Transistors for Circuit Simulation
Session 38: Solid State Devices - Power ICs
- Power IC's Move Ink Jet Printers to New Performance Levels (Invited Paper)
- A Novel LDMOS Structure with A Step Gate Oxide
- High Voltage BiCMOS Technology on Bonded 2 m SOI Integrating Vertical pnp
npn, 60V-LDMOS and MPU, Capable of 200 C Operation
- An Effective Cross-Talk Isolation Structure for Power IC Applications
- Integration of a Novel High-Voltage Giga-hertz DMOS Transistor Into a
Standard CMOS Process
- Fully depleted 30-V-Class Thin-Film SOI Power MOSFET
- Optimization of High Q Integrated Inductors in Multi Level Metal CMOS